Air Bearing Stages support 450 mm wafer initiative.

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July 10, 2012 - Using linear motors, DynamYX® Datum(TM) 450 and 450GT deliver dynamic positioning of wafer chuck or similar substrate in 2 orthogonal translation axes from single-plane carriage. Units provide max velocity of 1.5 m/sec with acceleration of 2G in Y axis and 3G in X axis. Vertical Z-axis with tip/tilt function and rotary axis for wafer offset correction can be added. With rated payload of 20 kg, 300 Hz natural frequency stages feature 50 nm accuracy and 10 nm repeatability.